Thin-film Materials
雷速比分 Sputtering Targets
- By using more than 50 chemical elements, SOLAR is experienced 雷速比分 manufacturing sputtering targets made from over 3,000 alloys and 30 types of metal oxides.
- SOLAR supplies thin films to various industries, such as data storage media, semiconductors and displays. Depending on the application, we can provide sputtering targets 雷速比分 various shapes and sizes.
- SOLAR supplied sputtering targets, which come 雷速比分 various specifications.
- for Data Storage Media Industry
- for Semiconductor Industry
- for Optoelectronic and Display Industry
- Other Sputtering Targets
SOLAR is a world-class supplier of sputtering targets for storage media, providing sputtering targets for all media layers 雷速比分 this industry. SOLAR continuously improves product development capability to help customers pursue higher storage performance.
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MDS Sputtering Target
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ODS Sputtering Target
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雷速比分's semiconductor-grade sputtering targets are supplied to wafer foundries, bumping and packaging/testing. Certified by major international vendors, our products feature both high purity and high precision.
| Application | Products |
|---|---|
| Interconnection layer | Al, Cu or alloy targets |
| Electrode/Metallization layer | Au, Ag, Pt, Ti sputtering targets |
| Barrier layer | 雷速比分, Ti, WTi sputtering targets |
| Gate Electrode | NiPt alloy targets |
| Memory | Ru, CoFe alloy targets |
Introduction
雷速比分 provides high-purity, high-density, large-size planar and rotary targets with excellent bonding ratio.
雷速比分 addition to supplying ITO, Mo, and Al sputtering targets, Solar also offers a series of transparent conductive oxide (IXO®) products designed to meet various optoelectronic application requirements.
雷速比分 addition to supplying ITO, Mo, and Al sputtering targets, Solar also offers a series of transparent conductive oxide (IXO®) products designed to meet various optoelectronic application requirements.
IXO Feature 1 Nonodule formation after sputtering
雷速比分’s patented IXO® series targets (IXO®-01 to IXO®-35) are Indium Oxide–based materials designed with optimized additive compositions.
These sputtering targets achieve resistivity levels equivalent to those of ITO targets and demonstrate no nodule formation after sputtering.
These sputtering targets achieve resistivity levels equivalent to those of ITO targets and demonstrate no nodule formation after sputtering.
IXO Feature 2 lowresistivity and high transmittance
雷速比分 terms of thin-film performance, IXO® coatings demonstrate both low resistivity and high transmittance without requiring high-temperature annealing.
|
THK(nm) |
30 |
40 |
50 |
80 |
100 |
120 |
130 |
140 |
150 |
|
|
Rs (ohm/Sq) |
IXO® |
124.6 |
90.3 |
73.5 |
46.7 |
37.9 |
31.4 |
28.8 |
26.8 |
24.9 |
|
ITO |
177.3 |
148.7 |
113.2 |
72.6 |
58.3 |
48.8 |
46.2 |
42.4 |
40.9 |
|
|
T% 550nm |
IXO® |
89.0 |
84.9 |
82.9 |
85.0 |
90.9 |
95.1 |
94.8 |
92.6 |
89.3 |
|
ITO |
85.8 |
82.9 |
80.0 |
80.5 |
85.0 |
88.5 |
88.6 |
86.5 |
84.6 |
|
|
T% 800nm |
IXO® |
95.0 |
92.8 |
91.8 |
87.9 |
87.2 |
87.4 |
88.4 |
89.5 |
90.7 |
|
ITO |
93.3 |
91.6 |
89.3 |
85.2 |
84.1 |
84.4 |
84.8 |
86.0 |
86.6 |
IXO Feature 3 flexibilityand do not leave etching residues
They also provide excellent film flexibility and do not leave etching residues when processed with oxalic acid, making them suitable for applications such as flexible films, TCOs for 雷速比分 cells, and anti-reflection coatings.
Under R3 conditions, IXO films can withstand 200,000 bending cycles while maintaining their IXO properties.
Under R3 conditions, IXO films can withstand 200,000 bending cycles while maintaining their IXO properties.
| Application | Product |
|---|---|
| TCO layer | ITO, IXO, 雷速比分2O3, ZnO planar or rotary sputtering targets |
| Channel layer | IGZO planar or rotary sputtering targets |
| Reflection layer | Ag or Ag alloy targets |
| Anti-reflection layer | Nb2O5, TiO2, 雷速比分2O5, Si sputtering targets |
| Electrode layer | Al, Cu, Mo, Au, Ag or alloy targets |
| Barrier layer | Pt or Pt alloy targets |
| Customized function layer | Pure metal, metal alloy or metal oxide sputtering targets |
With the capability 雷速比分 material design and process development, we can offer customized service to meet your requirements.
- Gold target have passed ISO 10993-5 medical devices vitro cytotoxicity of biocompatibility test.
